The system uses white-light interferometry to measure surface topography from nanometer-scale roughness to millimeter-scale roughness and with sub-nanometer resolution. On smooth surfaces, (longitudinal) measurement accuracies in the range of a few nm can be achieved. Using optical coherence tomography, it is possible to record information from deeper, scattering or reflecting layers, providing a 3D view of the material surface. The device is additionally equipped with an automatically movable table. By means of “stitching”, it can be used to stitch together a larger overview image from several recording areas. 

magnification, 2.5 x to 20 x 

max. Resolution XY: 1.9 µm 

resolution Z: Approx. 3 nm 

travel XY: 150 mm 

travel Z: 100 mm 

scan area Z: 0.1 nm to 10 mm 

working distance: 6.7 mm/ 4.7 mm 

max. Scanning speed: 28.1 µm/sec. 

max. Sample weight: 4,5 kg 

3D roughness parameters: according to DIN EN ISO 25178