RTA Furnace IAP MZG 102
DESCRIPTION
Rapid Thermal Anneal Furnace for fast Heating of flat samples
Sample size: max 150 mm round Wafer ( max 5mm high)
Temp range: 100...1200°C, max ramp 15sec to 1200°C
measurement: Thermocouple <800°C, Pyrometer >400...1200°C
Max holding time: / Process time 9h / depending on End temperature
Max time Steps: 40
| End Temp | Measurment | Ramprate | hold time | Time Step max | |
| °C | K/min | h | s | ||
| 200 | TC | (1)…500 | max 9 | ||
| 300 | TC | (1)…500 | max 9 | 4896 | |
| 400 | TC | (PM) | (1)…500 | max 9 | 4050 |
| 500 | TC | PM | 2...1000 | max 9 | 2592 |
| 600 | TC | PM | 2...1000 | max 9 | 1800 |
| 700 | TC | PM | 2...1000 | 8,8 | 900 |
| 800 | TC | PM | 2...1000 | 5,8 | 600 |
| 900 | (TC) | PM | 4...1000 | 4,4 | 450 |
| 1000 | (TC) | PM | 4...1000 | max 1(...3,5) | 360 |
| 1100 | PM | 10...1000 | max 1(...2,9) | 300 | |
| 1200 | PM | 10...1000 | max 1(...2,1) | 220 | |
| TC = Thermocouple | |||||
| PM = Pyrometer | |||||