Dimension Edge Specifications

X-Y Scan Range 90μm x 90μm typical, 85μm minimum

Z Range 10μm typical in imaging and force ramp modes, 9.5μm minimum

Vertical Noise Floor <50pm RMS in appropriate environment, typical imaging bandwidth (up to 625Hz)

XY Position Sensor Noise Level (Closed Loop) <0.5nm RMS typical imaging bandwidth (up to 625Hz)

Z Position Sensor Noise Level (Closed Loop) <0.2nm RMS typical imaging bandwidth (up to 625Hz)

Sample/Size/Holder 150mm vacuum chuck, 15mm thick; Up to 40mm thick with optional frame spacer

Motorized Positioning Stage (X-Y axis) 150mm x 150mm inspectable area; Programmable for multi-site measurements

Microscope Optics 5-megapixel digital camera; 180μm to 1465μm viewing area; Digital zoom and motorized focus

AFM Modes: Contact Mode, Lateral Force Microscopy, TappingMode™, PhaseImaging™, LiftMode, Magnetic Force Microscopy, Electric Force Microscopy, Dark Lift, Force Spectroscopy, Nanoindentation, Nanolithography, Adhesion, ScanAsyst Spring constant calibration with built-in thermal tune