Cross beam FIB/SEM system

Suitable for samples with 100mm diameter maximum

SEM inspection & FIB cross-sectioning

• field emission SEM (0.8 pA – 100 nA; 20 eV – 30 keV; 0.54 nm)

• gallium focused ion beam (1.1 pA – 65 nA; 0.5 – 30 keV; 3.7 nm)

• SE, SI, BSE, and STEM detector

• charge compensation

• 4 single GIS systems (Pt, C, F)

• 4 axes micro-manipulator

• automated slicing for 3D reconstruction

• ion and electron beam lithography